(EyesonSci)CHINA-SICHUAN-UNDERGROUND LAB-OPERATION (CN)

(EyesonSci)CHINA-SICHUAN-UNDERGROUND LAB-OPERATION (CN)

(231207) -- JINPING, Dec. 7, 2023 (Xinhua) -- This photo taken on Nov. 7, 2023 shows workers transporting a gas argon tank at the Deep Underground and Ultra-low Radiation Background Facility for Frontier Physics Experiments (DURF) in Liangshan Yi Autonomous Prefecture of southwest China's Sichuan Province. A 2,400-meter-deep physics laboratory in southwest China's Sichuan Province became operational on Thursday, making it the deepest and largest underground lab in the world. Scientists believe the laboratory provides a "clean" space for them to pursue the invisible substance known as dark matter. They said the extreme depth helps block most cosmic rays that mess with the observation. The Deep Underground and Ultra-low Radiation Background Facility for Frontier Physics Experiments (DURF) is located beneath Jinping Mountain in Sichuan's Liangshan Yi Autonomous Prefecture. The DURF, with a total room capacity of 330,000 cubic meters, is the second phase of China Jinping Underground Laboratory. It started constru

Technology to etch Kai semiconductor with fluoroplastic instead of CFC gas

Technology to etch Kai semiconductor with fluoroplastic instead of CFC gas

The established technology will be used for dry etching, thin film formation and cleaning of silicon. Easy-to-handle gases such as argon and nitrogen are irradiated onto solid fluoropolymers to generate fluorine-containing gas. The gas is then used for plasma treatment. Using a proto device with electrodes developed for special equipment, the company irradiated nitrogen gas and etched a glass substrate, and was able to etch 40 nanometers in one minute. The company plans to achieve an etching speed of 200 nanometers for commercialization. Plasma is an unstable state in which electrons have been removed from molecules, and it modifies the surface of materials, improving adhesion and cleaning effects. (Photo taken on March 30, 2020, location unknown, credit: Nikkan Kogyo Shimbun / Kyodo News Images)