Technology to etch Kai semiconductor with fluoroplastic instead of CFC gas

Technology to etch Kai semiconductor with fluoroplastic instead of CFC gas

The established technology will be used for dry etching, thin film formation and cleaning of silicon. Easy-to-handle gases such as argon and nitrogen are irradiated onto solid fluoropolymers to generate fluorine-containing gas. The gas is then used for plasma treatment. Using a proto device with electrodes developed for special equipment, the company irradiated nitrogen gas and etched a glass substrate, and was able to etch 40 nanometers in one minute. The company plans to achieve an etching speed of 200 nanometers for commercialization. Plasma is an unstable state in which electrons have been removed from molecules, and it modifies the surface of materials, improving adhesion and cleaning effects. (Photo taken on March 30, 2020, location unknown, credit: Nikkan Kogyo Shimbun / Kyodo News Images)

Guinness calls Japanese thermometer world's smallest

Guinness calls Japanese thermometer world's smallest

TSUKUBA, Japan - The Guinness World Records book has named a thermometer (release photo) using a carbon nano tube as the world's smallest thermometer, its developer, the National Institute for Materials Science, said Dec. 3. The thermometer, developed by Yoshio Bando and another scientist at the government-affiliated institute in Tsukuba, Ibaraki Prefecture is a tube formed by carbon atoms. Measuring about 85 nanometers in diameter and several thousand nanometers in length, it can measure temperatures between 18 C and 490 C with a 0.25 degree notch. It can be used to measure temperatures in capillary blood vessels and detect abnormalities in computer chips. (Kyodo)

NEC claims discovery of "carbon nanobrush"

NEC claims discovery of "carbon nanobrush"

Sumio Iijima, a senior research fellow with NEC Corp., attends a press conference in Tokyo on June 30, 2016. The company said it has discovered a new carbon material with a diameter of 100 nanometers (nano is a billionth) that has high electrical conductivity. The new substance, named "carbon nanobrush" by NEC, could be used for rapid electric vehicle charging and for the production of artificial muscle for robots. (Kyodo) ==Kyodo

NEC claims discovery of "carbon nanobrush"

NEC claims discovery of "carbon nanobrush"

Sumio Iijima, a senior research fellow with NEC Corp., attends a press conference in Tokyo on June 30, 2016. The company said it has discovered a new carbon material with a diameter of 100 nanometers (nano is a billionth) that has high electrical conductivity. The new substance, named "carbon nanobrush" by NEC, could be used for rapid electric vehicle charging and for the production of artificial muscle for robots. (Kyodo) ==Kyodo

NEC claims discovery of "carbon nanobrush"

NEC claims discovery of "carbon nanobrush"

Sumio Iijima, a senior research fellow with NEC Corp., wears a model of a nano carbon material on his head in jest during a press conference in Tokyo on June 30, 2016. The company said it has discovered a new carbon material with a diameter of 100 nanometers (nano is a billionth) that has high electrical conductivity. The new substance, named "carbon nanobrush" by NEC, could be used for rapid electric vehicle charging and for the production of artificial muscle for robots. (Kyodo) ==Kyodo